Ultra-low Flow Controllers & Meters

Sierra Instruments new Micro-Trak is specifically designed for gas flow ranges under 4 sccm (smlm) with a minimum controllable mass flow rate of 0.1 sccm (smlm). Micro-Trak? is a specialized instrument for those who need accurate and reliable micro mass flow control of clean gases including corrosives and toxics. Excellent accuracy (+/- 1.0% of full scale) and reliability (+/- 0.2%) coupled with unsurpassed instrument stability offer customers an instrument they can depend on, month after month, year after year.


Sierra's Micro-Trak 101 Series - High Performance Digital Mass Flow Meters and Controllers for Ultra Low Gas Flows

As today's science and engineering focus more and more on micro technology, the requirement to be able to measure and control extremely low gas mass flows has become very important. With state-of-the-art sensor technology and highly engineered direct acting valve design, Sierra's Micro-Trak? accurately measures and controls micro mass flows of gas previously thought by scientists to be too low for a repeatable reading.

Sierra Instruments Micro-Trak? is specifically designed for gas flow ranges under 4 sccm (smlm) with a minimum controllable mass flow rate of 0.1 sccm (smlm). Micro-Trak? is a specialized instrument for those who need accurate and reliable micro mass flow control of clean gases including corrosives and toxics. Excellent accuracy (+/- 1.0% of full scale) and reliability (+/- 0.2%) coupled with unsurpassed instrument stability offer customers an instrument they can depend on, month after month, year after year.
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Demonstrating the best response time of any ultra-low flow controller:

? Suitable for most gases with flow rates down to 0.1 sccm (smlm)
? Accuracy of +/- 1.0% of full scale
? Repeatability of +/- 0.2% of full scale
? 316 Stainless steel construction
? Digital performance with maximum flexibility
? Primary Standard calibration and NIST traceability
? Dial-A-Gas Technology?10 preprogrammed gases or select your own
? Unique Pilot Module allows control and display of functions
? All functions also available via RS-232
? Traditional analog controls and outputs also included: 4-20 mA, 0-5 VDC, 1-5 VDC, 0-10 VDC
? Small footprint makes installation easy
? 24 VDC power supply
? CE approval