World’s Smallest Mass Flow and Pressure Controllers

Equipment manufacturers are looking for compact solutions to monitor or control gas flow or pressure in their system. Conventional mass flow and pressure meters / controllers needed a footprint of 1.5". Due to the use of micro solid state technology (MEMS), Bronkhorst has been able to halve the footprint dimension to 0.75", thereby realising ultra-compact mass flow and pressure controllers. The combination of thermally balanced chip-sensor with integrated digital electronics, features high accuracy, fast response and a very stable zero.

The IQ+FLOW concept offers the option of bespoke designs for OEM customers, in which various functions are combined into one microfluidic system. The following functional modules can be integrated on a compact manifold: flow meter, pressure meter, control valve, shut-off valve, three-way valve, mixing chamber. The ‘plug and perform’ assembly ensures space efficiency, cost reduction and a minimum of potential leak points. Typical application: flow/pressure control in Gas Chromatography systems.