World’s Smallest Mass Flow and Pressure Controllers
May 09 2018 Read 536 Times
Equipment manufacturers are looking for compact solutions to monitor or control gas flow or pressure in their system. Conventional mass flow and pressure meters / controllers needed a footprint of 1.5". Due to the use of micro solid state technology (MEMS), Bronkhorst has been able to halve the footprint dimension to 0.75", thereby realising ultra-compact mass flow and pressure controllers. The combination of thermally balanced chip-sensor with integrated digital electronics, features high accuracy, fast response and a very stable zero.
The IQ+FLOW concept offers the option of bespoke designs for OEM customers, in which various functions are combined into one microfluidic system. The following functional modules can be integrated on a compact manifold: flow meter, pressure meter, control valve, shut-off valve, three-way valve, mixing chamber. The ‘plug and perform’ assembly ensures space efficiency, cost reduction and a minimum of potential leak points. Typical application: flow/pressure control in Gas Chromatography systems.
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