Worlds Smallest Mass Flow and Pressure Controllers

Equipment manufacturers are looking for compact solutions to monitor or control gas flow or pressure in their system. Conventional mass flow and pressure meters / controllers needed a footprint of 1.5". Due to the use of micro solid state technology (MEMS), Bronkhorst High-Tech BV has been able to halve the footprint dimension to 0.75", thereby realising ultra compact flow and pressure controllers. The combination of thermally balanced chip-sensor with integrated digital electronics, features high accuracy, fast response and a very stable zero.

Core philosophy of Bronkhorst is to form close working links and collaborations with Original Equipment Manufacturers to ensure optimised integration of the instruments. Most often this results in a bespoke design in which various functions are combined into one micro fluidic system. The IQ+FLOW concept offers these functional modules: flow meter, pressure meter, control valve, shut-off valve, three-way valve, mixing chamber.

A combination of modules can be mounted on a compact manifold, in line with a customers requirement, and following open design discussions. The "plug and play" assembly ensures space efficiency, cost reduction and a minimum of potential leak points. Example of typical application: flow/pressure control in Gas Chromatography systems.