Vacuum Controller for Passive Sensors in Rough Applications

The new three-channel vacuum display and controller COMBIVAC CM 51 from Oerlikon Leybold Vacuum GmbH for industrial and research applications, monitors and controls the complete vacuum range from atmospheric pressure (1000 mbar) down to the ultra high vacuum range (10-9 mbar). All channels can be operated simultaneously and absolutely independently.

The vacuum gauge is designed for Pirani and Penning passive (passive, as there are no electronic parts inside the sensor) sensors, which are radiation resistant and bakeable. The COMBIVAC CM 51 operates in harsh and highly corrosive industrial applications. It is also suitable for use in areas with high levels of radiation and systems requiring high temperature bake out where only passive sensors can be operated.

Typical Applications in the process industry include: vacuum furnaces, electron beam welding, coating, and lighting; the research and development include: accelerators, MBE (Molecular Beam Epitaxy), and STM (Scanning Tunneling Microscope); and analytical instruments include surface analysis.

Additional advantages: compact bench top enclosure, also for racks (1/4 19-in, 3 HU); high sensor reliability and lifetime; 3-channel-measurement and display simultaneously; cable length up to 100 meters; RS 232 C and profibus interface for communication and remote control; connection of aligned and temperature compensated THERMOVAC sensors; connection of compact, bakeable and rugged PENNINGVAC sensors; automatic

switchover and high voltage control from THERMOVAC to PENNING (cold cathode) operation; and error message for each channel, for example in the case of broken filament, defective sensor line or failed plasma discharge.