Pumps and valves
Weighing in at just 7.5kg, the DAU/DTU vacuum pumps from ULVAC achieve higher vacuum levels using dry diaphragm pump technology. They feature a pumping speed of 20 liters/min at 50 Hz with an ultimate vacuum level of 0.2 hPa with very low vibration. The DTU model offers an additional level of corrosion resistance against harsh and corrosive gases.
ILM Guide 2026/27
Product directory
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