Innovative Nano-Technology for Contact-Free Surface Measurement

Leica Microsystems presents a new technology for contact-free 3D surface measurement that resolves structures smaller than one nanometer. Combining confocal microscopy, interferometry and colour imaging in one sensor head for the first time, the 3D Measuring Microscope DCM 3D is a joint development of Leica Microsystems and the Spanish company Sensofar-Tech.

The DCM 3D offers ultrafast and contact-free analysis of the micro- and nanogeometry of material surfaces to an accuracy of 0.1 nanometer. A confocal microdisplay postioned in the field diaphragm, two light sources and two cameras produce unlimited field depth and highly precise 3D results. The LED light source and the sensor head, which requires no mechanically moving parts, make the system practically maintenance-free.

The DCM 3D is suitable for a wide variety of measurement applications in R&D and quality assurance laboratories all the way to online process control. Brightfield, interferometric and confocal images can be produced via the microdisplay. The DCM 3D measures smooth and rough surfaces, topological differences from nanometers to a few millimeters and flanks up to 70°. The sample is simply placed under the microscope and focused. One keystroke is enough to generate a 3D image of the surface in only a few seconds.

The DCM 3D integrates two CCD cameras, a colour camera for brightfield analysis and a monochromatic camera for metrological detection. The software enables 3D imaging in different colour modes such as a

pseudocolour display of topological information, confocal stacks, infinitely focused colour image and high-resolution confocal luminance with the chrominance signal of the colour camera.