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The Analysis Laboratory for Micro- and Nanotechnology at the Fraunhofer Institute for Integrated Systems and Device Technology IISB in Erlangen has been accredited by the ‘Deutsche Gesellschaft für Akkreditierung’ following DIN EN ISO/IEC 17025:2005. The testing laboratory in Erlangen carries out tests in the fields of physical, physico-chemical, and chemical analysis of substrates, media, and materials for micro and nanotechnology. The accreditation of the testing laboratory demonstrates the expertise and cutting edge of Fraunhofer IISB in the area of trace and material analysis for micro and nanoelectronics.
IISB characteriSes semiconductor processes and investigates samples of semiconductor wafers, ultra clean chemicals, consumables, and construction materials. They are used in key industries, as, for example, the chip industry, micro systems technology or photovoltaics. Furthermore, manufacturers and suppliers for high-tech manufacturing equipment and metrology-basedmonitoring systems are supported. A further area of expertise is the control of environmental conditions and contaminations in ultra clean rooms and so-called mini-environments.
This is also especially beneficial for small and medium enterprises, which neither can afford nor want to operate an own laboratory infrastructure. The accreditation is an internationally accepted proof of competence concerning the methodology of testing, instrumentation, and infrastructure, impartiality and confidentiality regarding the handling of test results. The reliability of the document management is also certified.
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