High-sensitivity TOC analyser for ultrapure water monitoring

Analysers

High-sensitivity TOC analyser for ultrapure water monitoring

08 Jul, 2026

Shimadzu has expanded its eTOC series with the launch of the TOC-1000e S, a high-sensitivity online total organic carbon (TOC) analyser designed for continuous monitoring of ultrapure and ultra-ultrapure water in semiconductor manufacturing and other high-purity production environments.

Water quality is critical in industries such as semiconductor manufacturing, where even trace levels of organic contamination can affect product quality, manufacturing yield and equipment performance. As semiconductor devices continue to become more complex, manufacturers require increasingly sensitive monitoring systems to maintain consistent production conditions.

Total organic carbon is a widely used indicator of organic contamination in high-purity water systems. Continuous TOC monitoring enables manufacturers to identify changes in water quality as they occur, helping maintain process consistency while reducing the risk of contamination affecting production.

The TOC-1000e S provides real-time monitoring of organic carbon levels, enabling operators to detect contamination events early and respond before production is affected. The analyser complements Shimadzu's existing TOC-1000e platform, extending the eTOC range into applications requiring even greater analytical sensitivity.

The system incorporates Shimadzu's excimer lamp oxidation technology and Active-Path flow design to support stable, long-term measurements while minimising sample residue within the flow path. Long maintenance intervals, a compact footprint and flexible integration into existing process infrastructure are intended to reduce servicing requirements and simplify installation in demanding production environments.

Across high-purity manufacturing industries, continuous online monitoring is increasingly replacing periodic sampling as companies seek greater process visibility, tighter quality control and improved operational reliability. The TOC-1000e S has been developed to support these evolving requirements while helping manufacturers maintain consistent water quality throughout production.

Although developed primarily for semiconductor manufacturing, the analyser is also suitable for pharmaceutical production, hydrogen manufacturing and other precision industries where high-purity water is essential to process performance.

Shimadzu's eTOC series provides continuous monitoring of organic contaminants in pure, ultrapure and ultra-ultrapure water systems, supporting process control and water quality management across a range of industrial applications.

More information online

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ILM 51.5 July 2026

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