High Resolution Microstructural  Analysis in the SEM with EBSD

Bruker’s e-Flash ^HR electron backscatter diffraction (EBSD) detector offers both high resolution and sensitivity to solve the most difficult cases in microstructural analysis in the SEM. As one of two detector options for the CyrystAlign EBSD analysis system, it offers a native resolution of almost 2 Megapixels (1600 x 1200 pixels) . Its excellent sensitivity makes EBSD measurements possible even at probe currents as low as 0.5 nA. State of the art camera optics allow the acquisition of patterns with minimum distortion. All these properties make the e‑FlashHR the best solution when dealing with complex EBSD analysis cases.

The list of suitable applications includes:

•  low beam current operation

•  low kV operation

•  poorly conducting samples

•  nanomaterials

• analysis of pseudosymmetries

•  lattice strain investigation.

The e‑Flash HR detector has an unique in-situ tilt capability which allows the user to shift the fluorescent screen vertically to cover a very large WD range so that every measurement is made at optimum pattern center values and best diffraction signal distribution. The detector head of the e‑FlashHR has a slim and tapered design to enable working at small working distances (WD) as well as short detector-to-sample distances. The e‑FlashHR has been designed to be used in combination with the XFlash^®EDS detectors. All EBSD detector electronics and  those of the optional ARGUS™ BSE/FSE imaging system electronics as well as all moving parts are housed inside the detector case.