Trio to Explore ALD Applications in MEMS

Picosun, a Finnish company specialising in Atomic Layer Deposition (ALD) is collaborating with Swedish Silex Microsystems and Pegasus Chemicals from the UK, to bring novel ALD solutions to MicroElectroMechanical Systems (MEMS) industries. MEMS are found in various of every day applications such as mobile phones and cars, and with the advent of Internet-of-Things where billions of electronic devices will be connected, MEMS industries are likely to grow exponentially.

The Picosun-Silex-Pegasus partnership looks to be at the forefront of this development by installing a PICOSUN ALD Cluster platform in Järfalla, Sweden, to be used to develop novel ALD solutions for advanced MEMS application. Pegasus Chemicals will develop and manufacture the precursor chemicals needed for the ALD processes.

“This is a valuable project for us, as the use of ALD in MEMS processing is increasing very fast,” said Juhana Kostamo managing director of Picosun. “We have already strong presence in the MEMS market, but new applications come up weekly and we want to keep our spearheading position in this development.”

The collaboration is part of the EU-funded SALADIN project.